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1、微微电子子专业英英语课件件第1页，本讲稿共73页 Zhang HongChangzhou College of Information TechnologyMicro-electronic Professional English第2页，本讲稿共73页Chapter I History Unit 1vThe first seven bench diffusion furnaces used in the corner of Fairchilds Palo Alto facility were very similar to furnaces used by Shockley Semicondu
2、ctor.The First Transistor in Fairchilddiffusion n.扩散，传播扩散，传播 diffusion furnaces 扩散炉扩散炉facility n.设施设施,容易容易,熟练熟练,设备设备Supplementary Words：diffusion capacitance 扩散电容第3页，本讲稿共73页v译文：处于困境中的仙童Palo Alto工厂使用的的第一批七台扩散炉和肖克莱半导体公司使用的扩散炉非常相似。第4页，本讲稿共73页vCecil A.Lasch,Jr.,a technician who worked at Fairchild,did m
3、ost of the work on the diffusion furnace hardware.译文：译文：Cecil A.Lasch,Jr，仙童公司的，仙童公司的技术员，在扩散炉硬件上作出了大量工技术员，在扩散炉硬件上作出了大量工作。作。第5页，本讲稿共73页vThe quartz tube of Fairchilds diffusion furnace had an inner diameter of 2 and a quartz liner between the processing tube and heating element.A very simple“variac”adj
4、ustable variable transformer was used to control the temperature of the single zone.quartz n.石英 tube n.管子,管,真空管 diameter n.直径 transformer n.变压器 Supplementary Words：quartz crystal 石英晶体 tube diode 真空二极管 第6页，本讲稿共73页v译文：仙童扩散炉的石英管内径，加工管和加热元件中间有一个石英衬垫。用一个非常简单的自耦变压器来控制单区的温度。第7页，本讲稿共73页vThe tube was equippe
5、d with a network of quartz pipes,quartz valves,and flowmeters.All systems resembled research laboratory equipment rather than industrial manufacturing equipment.pipe n.管子,笛子,烟斗,管乐器valve n.阀门,阀,瓣膜,瓣,闸阀 flowmeter n.流量计resemble v.像,很像,比拟 第8页，本讲稿共73页v译文：石英管配备有石英管、石英阀门和流量计组成的网络。所有系统都类似于研究实验设备，而不是工业制造设备。第
6、9页，本讲稿共73页vThe wafers were pushed into and pulled out of the tubes manually.Cooling of wafers usually took place in a cool zone within the diffusion tube,which allowed the wafers to cool to a temperature suitable for handling.wafers n.晶圆第10页，本讲稿共73页v译文：手动把晶圆送入和退出石英管。晶圆冷却通常在扩散管的阴凉区内进行，使晶圆冷却到适合处理的温度。第
7、11页，本讲稿共73页vThe programmed heating and cooling was not used because of the difficulty in maintaining good temperature profiles.profile n.规范概要Supplementary Words：Program Overview and File 程序概要和文件第12页，本讲稿共73页v译文：不使用程序加热和冷却是因为它难以保持良好的温度分布。第13页，本讲稿共73页vThe used gases were just emitted into the atmospher
8、e by vents placed just above diffusion tube exhausts.Supplementary Words：exhaust valve 排气阀 exhaust algorithm 穷举算法 vent n.通风口,开衩,通风孔,出口,排放exhaust n.排气，排气装置 第14页，本讲稿共73页v译文：通过扩散管排气孔上方的通风孔把使用的气体通入到特定空间中。第15页，本讲稿共73页vThere was no“clean room etiquette”,and the chain smoker Robert Noyce frequently smoked
9、in the Fairchild manufacturing facility.etiquette n.礼节,礼仪,道德规范chain smoker n.老烟枪 Supplementary Words：chain break 链中断 第16页，本讲稿共73页v译文：没有“洁净室规矩“，烟鬼Robert Noyce经常在仙童制造工厂内抽烟。第17页，本讲稿共73页vJay Last,who had a background in optics from the time of his studies at MIT,paired with Robert Noyce and designed con
10、tact masking equipment that aligned masks to the wafer flat.optics n.光学MIT（Massachusettes Institute of Technology）(美国)麻省理工学院align vt.排列，对准 Supplementary Words：optics design 光学设计第18页，本讲稿共73页v译文：最后，在麻省理工学院学习过光学的Jay和Robert Noyce搭档，设计出了和晶圆表面匹配的接触式掩模设备。第19页，本讲稿共73页vThe structure and dimension of the Fair
11、child mesa transistor was identical to the Bell Laboratories transistor 2N560.Shockley Laboratory was provided with all details of new Bell Labs devices and“The California Group”had full access to this information.mesa transistor n.台面型晶体管Supplementary Words：mesa diffusion 台面扩散 第20页，本讲稿共73页v译文：仙童台式晶体
12、管的结构和尺寸和贝尔实验室的晶体管2N560相同。肖克莱实验室提供了新的贝尔实验室的所有细节，“加州集团“已充分获得此信息。第21页，本讲稿共73页vThe geometry of the 2N560 and the Fairchild transistor was huge.The diameter of the mesa ring was approximately 750 m.Alignment error was not better than 100150 m.geometry n.几何,几何学,几何学书,图形 Supplementary Words：Geometry Theorem
13、 Prover 几何学定理证明第22页，本讲稿共73页v译文：2N560和仙童晶体管的几何形状都很大。台式环的直径大约750m。对准误差不超过100150 m。第23页，本讲稿共73页vThree masks were necessary to complete the transistors:1)Emitter region2)Base and emitter contacts3)Metalemitter n.发出者,发射体base n.基区 Supplementary Words：emitter follower射极跟随器 Base Band 基带第24页，本讲稿共73页v译文：完成晶体管
14、需要三个掩模：1）发射区2）基区和辐射源的接触3）金属第25页，本讲稿共73页vThe wafers were placed with their front side(resist)on the emulsion side of the masking plate,and exposed for 60 sec by mercury lamp.The exposed wafers were developed and backed.emulsion n.感光剂，乳状液masking plate n.掩膜板 expose v.使.曝光,使.处于,暴露,曝光mercury lamp n.汞灯 Su
15、pplementary Words：mercury tank 水银槽第26页，本讲稿共73页v译文：晶圆的前端（抗蚀剂）放置在掩膜板有感光剂的一侧，用汞灯曝光60秒。曝光后的晶圆显影、烘烤。第27页，本讲稿共73页vThere was a competition for six weeks between Gordon Moore and Jean Hoerni.Both transistor projects were successful,but the NPN transistor was easier to manufacture,mainly because of the conta
16、ct to the base.译文：Gordon Moore和Jean Hoerni有六个星期的竞争。两个晶体管方案都成功了，但是因为基极接触，NPN型晶体管更容易制造。第28页，本讲稿共73页vTo form an Aluminum ohmic contact to the moderately doped Antimony base of a PNP transistor is much more difficult than in the case of Boron doped base of an NPN transistor.aluminum n.ohmic adj.欧姆的 ohmi
17、c contact n.欧姆接触moderately adv.相当,不过分地 dope v.掺杂antimony n.锑 boron n.硼 Supplementary Words：ohmic resistance 欧姆电阻doped oxide diffusion 掺杂氧扩散 第29页，本讲稿共73页v译文：PNP晶体管中形成铝欧姆接触的中度掺杂锑基极比相同情况下NPN晶体管的硼掺杂基极要困难的多。第30页，本讲稿共73页vThe yield of the NPN transistors was higher and G.Moore,as head of group,had the powe
18、r to choose the NPN transistor as the first Fairchild transistor.Jean A.Hoerni was clearly unhappy that his PNP transistor did not prevail.Significant differences between Moores and Hoernis personalities only increased tension between Hoerni and his boss.yield n.成品率 prevail v.流行,优先,成功,获胜Supplementar
19、y Words：yield criteria 合格率标准第31页，本讲稿共73页v译文：NPN晶体管的产量较高，Gordon Moore作为集团的领导，有能力选择NPN晶体管作为第一个仙童晶体管。Jean Hoerni显然很不高兴，因为他的PNP晶体管并不占上风。Moore和Hoerni的性格的重大分歧使Hoerni和他的老板之间的关系更加紧张。第32页，本讲稿共73页vThe first 100 Fairchild transistors were mailed to IBM in July 1958.A tentative Specification for the 2N696 was i
20、ssued in August 1958 and an advertising campaign started in September 1958.The Fairchild silicon mesa transistors significantly improved several transistor parameters and there was no competitor who could offer similar products.第33页，本讲稿共73页tentative adj.试验的,暂时,犹豫的 advertising campaign n.广告宣传silicon
21、n.硅 Supplementary Words：tentative table of equipment 试行设备表 silicon MESFET process 硅金属半导体场效应晶体管工艺第34页，本讲稿共73页v译文：1958年7月，第一批个仙童晶体管邮寄给，1958年月发行的规格暂定为2N696，1958年月开始广告宣传。仙童硅晶体管大大提高了几个晶体管参数，也没有竞争对手提供类似的产品。第35页，本讲稿共73页vIn 1959,there were 26 companies manufacturing transistors and sales of transistors reac
22、hed approximately$0.8 Billion.译文：1959年，有个公司制造半导体，销售额约达亿美元。第36页，本讲稿共73页vIn November 1959 there was no product on the market that could compete with portfolio of eight Fairchild transistors.Despite that the yield of mesa transistors was very low,Fairchild sales reached$65,000.00 in July and August 195
23、8 because of the transistors high selling price.portfolio n.业务量despite prep.尽管第37页，本讲稿共73页v译文：1959年月，市场上没有任何产品可以和八仙童晶体管相竞争。尽管台式晶体管的产量很低，但是由于晶体管的售价很高，1958年月和月仙童的销售额高达.万美元。第38页，本讲稿共73页ExerciseAll systems resembled research laboratory equipment rather than industrial manufacturing equipment.The wafers
24、were pushed into and pulled out of the tubes automatically.The structure and dimension of the Fairchild mesa transistor was the same as the Bell Laboratories transistor 2N560.Alignment error of the mesa ring was less than 100150 m.The PNP transistor was easier to manufacture than the NPN transistor.
25、第39页，本讲稿共73页Unit 2vFairchilds epitaxial Micrologic product line was introduced in August 1963 at the Western Electronic Show and Convention(WESCON);Fairchild added new elements(4-input gate,half shift register without inverter)to their line which replaced completely the original Micrologic line.The
26、History of Logic Circuit第40页，本讲稿共73页 epitaxial adj.（晶体）取向附生的，外延的 micrologic adj.显微科学的WESCON：Western Electronics Show and Convention 西部电子展览和会议美shift register n.移位寄存器 inverter n.反相器Supplementary Words：shift register latch 移位寄存器锁存电路 第41页，本讲稿共73页v译文：仙童公司1963年8月在西部电子展览和会议（WESCON）上引入外延微逻辑生产线，仙童在他们的生产线上增加了
27、新元件（4个输入门，不带反相器的半移位寄存器），完全取代了原来的微逻辑生产线。第42页，本讲稿共73页vThe product manager for Micrologic,Mel H.Phelps announced at WESCON“an order of magnitude increase in deliveries of the new Micrologic.”The reduced time of isolation diffusion,from 22 hours to 6 hours,resulted in higher yield due to reduced wafer w
28、arpage and breakage.第43页，本讲稿共73页 order of magnitude n.数量级 isolation n.绝缘，隔离，分离isolation diffusion n.隔离扩散 result in v.结果是,造成warpage n.热变形，扭曲 Supplementary Words：isolation barrier 隔离势垒isolation region 隔离区 isolation masking 隔离掩蔽isolation leakage 隔离漏流 第44页，本讲稿共73页v译文：微逻辑的产品经理，Mel H.Phelps在WESCON上宣布：“新的微
29、逻辑传输增加了数量级。”绝缘扩散的时间从22小时减少到6小时，由于减少了晶圆的热变形和破损，使得产量提高了。第45页，本讲稿共73页vBob Noyce announced that by January 1964 the Mountain View facility would be converted to production of integrated circuits mainly,moving transistor work to the Portland,ME.,plant.The problem was that the Fairchild parts became obsol
30、ete.integrated circuits（IC）集成电路obsolete adj.废弃的,过时,废退的,过时的Supplementary Words：discrete IC 分立集成电路第46页，本讲稿共73页v译文：Bob Noyce说，到1964年1月，山景城设备将转换为集成电路的生产，把晶体管的生产移到波特兰、缅因州。问题是仙童的零件已经过时。第47页，本讲稿共73页vIn 1972 Bob Noyce said“we pushed RTL much longer than we should have.”The introduction of DTL by Signetics h
31、ad an enormous impact on the industry,because designers were quickly accustomed to working with the concept behind DTL.RTL：Resistor Transistor Logic 电阻晶体管逻辑（电路）DTL：Diode Transistor Logic 二极管晶体管逻辑（电路）第48页，本讲稿共73页v译文：1972年，Bob Noyce说：“我们推动的RTL远远长于我们预想的。”西格尼蒂克公司引进的DTL对工业产生了很大冲击，因为设计师很快习惯概念落后于DTL的方式工作。第
32、49页，本讲稿共73页vThe original four founders of Signetics had no circuit expertise.They hired Orville Baker as the manager of circuit development,and he unilaterally decided to go into DTL.unilaterally adv.一方地第50页，本讲稿共73页v译文：西格尼蒂克最初的四个创始人没有电路专业技术。他们聘请Orville Baker作为电路开发的经理，Orville Baker单方面决定从事DTL。第51页，本讲稿
33、共73页vSignetics came to the 1962 IRE show in New York with exactly one circuit,a NAND gate which sold for$125.00.Signetics never started in the discrete component business but quickly began a serious challenge to Fairchild in digital products.IRE：Institute of Radio Engineers 无线电工程师学会（美,已改名为IEEE）NAND
34、gate n.与非门 discrete adj.分立的，不连续的discrete component n.分立元件 第52页，本讲稿共73页v译文：西格尼蒂克1962年在纽约无线电工程师学会（IRE）使用一个电路，一个与非门售价125美元。西格尼蒂克从来没有着手分离元件业务，但是很快在电子产品方面对仙童发起了有力挑战。第53页，本讲稿共73页vWhen there is no competition,almost anyone can run a company.From the start the Fairchild management had an advantage to be ahe
35、ad of the crowd in a market at least by a year and a half.the crowd n.大众第54页，本讲稿共73页v译文：没有竞争时，几乎任何一个人都可以经营一个公司。最初，仙童公司经营在市场上占有很大的优势，比其他对手超前至少一年半。第55页，本讲稿共73页vWhen Signetics began winning the digital customers,and Fairchild digital revenue started to decline,Bob Widlars analog products maintained Fai
36、rchild revenue.Fairchild reported total sales$109.7 in 1965;just over$40 million was generated by higher priced linear parts.The problem of mismanagement of Fairchild was for another year or two hidden by Widlars success.第56页，本讲稿共73页revenue n.收入,收入来源,岁入 hide v 躲藏,隐瞒,遮掩,痛打,隐匿Supplementary Words：reven
37、ue bond 收益债券 revenue tax 财政关税,岁入税hidden field 隐式字段 第57页，本讲稿共73页v译文：当西格尼蒂克开始赢得数字消费者时，仙童数字产品收入开始下降。Bob Widlar的模拟产品维持着仙童的收入。仙童公司1965年报导的总销售是109.7美元，刚刚高于高价线性零件产生的4000万美元。在Widlar成功的掩盖下，仙童的管理不善的问题又持续了一两年。第58页，本讲稿共73页vThe required reliability testing involved putting each unit through 1000 hours of electri
38、c life test at high temperature,vibration test,etc.An explosive demand for integrated circuits which was triggered by a large quantity of Minuteman contracts caught the industry with demand in excess of capacity.第59页，本讲稿共73页reliability n.可靠性 vibration n.振动，颤动vibration test n.振动测试 explosive adj.爆炸的,爆
39、炸性,暴躁的trigger vt.触发,发射,引起 capacity n.容量，生产量，能力，地位Supplementary Words：reliability statistics 可靠性统计vibration noise 振动干扰 第60页，本讲稿共73页v译文：必须的可靠性测试包括在高温、震动等条件下测试每一个元件1000个小时的电气寿命。大量“民兵”合同触发了集成电路的爆炸性需求，引起了业界的超量需求。第61页，本讲稿共73页vExact numbers were classified,but very reasonable estimates called for tens of t
40、housand of parts every month.Everybody tried to climb on the bandwagon at once.The cost of manufacturing,cycle time,and overall manufacturing efficiency suddenly became a big issue.第62页，本讲稿共73页estimate n.估计,看法 climb on the bandwagon赶时髦；追随潮流cycle time n.周期 overall adj.从头到尾的,总,总的Supplementary Words：re
41、liability statistics 可靠性统计vibration noise 振动干扰 第63页，本讲稿共73页v译文：确切的数字是机密的，但是非常合理的估计每个月有成千上万个零件。每个人都试图一次攀登上这个行列。制造费用、循环周期和全部制造效率突然变成了一个大的问题。第64页，本讲稿共73页vThe circuits were used in the inertial guidance,computer,flight control and ground support for Minuteman II.In addition to the current four suppliers
42、(Texas Instruments 18 circuits,Westinghouse 18 circuits,RCA one circuit,General Electric one circuit)four other companies were considering to apply for Autonetics qualification.第65页，本讲稿共73页inertial guidance n.惯性制导 flight control n.飞行控制ground n.地,土,场地,场院,底子,地方 Texas Instruments 德克萨斯（德州）仪器Westinghouse
43、 美国西屋公司 RCA：美国无线电公司General Electric 通用电气公司 Autonetics n.自动控制学qualification n.资格,限制,执照第66页，本讲稿共73页Supplementary Words：inertial mass 惯性质量ground base 共基极接地 ground circuit 接地电路qualification phase 限定相位 qualification test 合格性试验qualification time 鉴定时间第67页，本讲稿共73页v译文：电路用于惯性指导、计算机、导弹II的飞行控制和地面支持。此外，除了目前的四个供应
44、商（德州仪器-18电路，Westinghouse-18电路，美国无线电公司（RCA）一个电路，通用电气公司的一个电路），其他的四个公司正考虑申请自动控制学资格。第68页，本讲稿共73页vTexas Instruments was the chief supplier at$9,875,649,Westinghouse Electronics Corporation$3,787,900;RCA$1,300,920;and the General Electric Co.,$153,042.The four other companies were Pacific Semiconductors,F
45、airchild Semiconductor,Signetics and Melpar.第69页，本讲稿共73页v德州仪器是首席供应商，价格是$9,875,649，Westinghouse电气有限公司$3,787,900，RCA$1,300,920，通用电气公司$153,042。其他的四个公司是太平洋半导体公司、仙童半导体公司、西格尼蒂克公司和Melpar。第70页，本讲稿共73页ExerciseIsolation diffusion saved 16 hours and reduced wafer warpage and breakage.None of the original four
46、founders of Signetics had circuit expertise.The introduction of DTL by Signetics had an enormous impact on the industry.The required reliability testing involved putting each unit through 100 hours of electric life test at high temperature,vibration test,etc.There are four companies to apply for Aut
47、onetics qualification.第71页，本讲稿共73页vTexas Instruments was the chief supplier at$9,875,649,Westinghouse Electronics Corporation$3,787,900;RCA$1,300,920;and the General Electric Co.,$153,042.The four other companies were Pacific Semiconductors,Fairchild Semiconductor,Signetics and Melpar.第72页，本讲稿共73页第73页，本讲稿共73页