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1、Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology真空物理与技术真空物理与技术第5章 真空获得（机械真空泵）2021/9/231Vacuum Science and Tech
2、nology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology第第5章章 真空获得真空获得l真空泵概述l机械式真空泵u旋片泵 分子泵 罗茨泵l气流泵u扩散泵l俘获泵u吸附泵 低温泵 升华泵 离子泵2021/9/232Vacuum S
3、cience and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology真空泵概述真空泵概述2021/9/233Vacuum Science and Technology Vacuum Science and T
4、echnology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology什么是真空泵？什么是真空泵？lThis is not a trivial question!u能能对空空间排气（减少气相分子数排气（减少气相分子数,产生低生低压空空间）的）的设备n通通过容容积压缩排气排气(Bulk acti
5、on)l机械机械压缩n动量量传输(molecular action)l分子直接碰撞分子直接碰撞l夹带：和其他分子碰撞：和其他分子碰撞n降低空降低空间气体分子气体分子浓度度:气体分子气体分子储存在表面存在表面时间 实验时间n所有的真空所有的真空泵都有一定的工作范都有一定的工作范围:l压强l气体种气体种类2021/9/234Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and T
6、echnology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology抽气原理抽气原理l降低空降低空间气体分子气体分子浓度（度（钛泵、低温、低温泵）l排出气体：旋片排出气体：旋片泵l定向运定向运动：扩散散泵、分子、分子泵、罗茨茨泵l“气体二极管气体二极管”u前前进 反向反向 压力差力差u返流返流（back through-put)反反扩散、脱附散、脱附l真空泵：能够维持压力差的设备2021/9/235Vacuum Science and Technology Vacu
7、um Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology按照抽气方式分类按照抽气方式分类l压缩性真空泵：将气体由一方压缩到另一方u利用膨胀-压缩-排出原理：旋片泵u利用气体束流牵引作用：蒸汽流喷射泵u利用高速表面牵引分子作用：分子泵l吸附型真空泵：
8、利用各种吸附作用将气体吸掉u利用电离吸气作用：离子泵u利用物理、化学吸附作用：吸附泵、低温泵、吸附剂泵2021/9/236Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology按
9、照压强范围分类按照压强范围分类l粗真空粗真空泵:u大气大气压-10-3 torrn旋片旋片泵n旋旋转柱塞柱塞泵n滑片滑片泵n吸附吸附泵n罗茨茨泵l高真空高真空泵u10-3 to 10-n torrn扩散散泵n低温低温泵n分子分子泵n离子离子泵2021/9/237Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and T
10、echnology Vacuum Science and Technology Vacuum Science and Technology按照排气压强分类按照排气压强分类l排气压强：泵在此压强下可以排气u往大气排气的泵n前级泵n前级压强n旋片式机械泵u只往低于大气压的环境排气n系统粗抽n需要前级泵（串联）n扩散泵、分子泵、罗茨泵u束缚泵n不需要出气口2021/9/238Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Techn
11、ologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology典型泵组典型泵组粗抽:机械泵主泵:扩散泵前级:机械泵2021/9/239Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Te
12、chnology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology真空泵性能的基本参数真空泵性能的基本参数l抽气速率S(抽速)u 单位时间流入泵内的气体量Q=S.P S=Q/Pl极限压强puu经过足够长时间的抽气后，所能达到的最低平衡压强l最大工作压强u泵能正常工作的最高压强l使用范围u具有抽气能力的压强范围l排气压强u这一压强下,泵可以可以工作排气l超高真空泵参数u抽气选择性、残余气体组分2021/9/2310Vacuum Science and Technolo
13、gy Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology抽速曲线抽速曲线工作压强范围抽速极限压强抽速与气体种类的关系抽速S一般不是常数，随压强变化而变化2021/9/2311Vacuum Science and Technology
14、Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology抽速范围抽速范围1.单级旋片泵(无气镇)2.单级气镇泵 3.罗茨泵4.喷射泵 5.扩散泵 6.分子泵2021/9/2312Vacuum Science and Technology V
15、acuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology真空泵的压强范围真空泵的压强范围2021/9/2313Vacuum Science and Technology Vacuum Science and Technology Vacuum
16、 Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology抽气曲线抽气曲线l被抽容器中压强随时间变化曲线u不随时间变化的压强就是极限压强u抽速大小由达到一定压强所需时间长短来估计n时间越短，抽速越大2021/9/2314Vacuum Science and Technology Vacuum Science an
17、d Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology真空系统时间常数真空系统时间常数l问题：S=60L/s的机械泵，对一个体积为10L的容器排气，是否经过10/60s，能将容器抽至P=0呢？u即使是即使是S=常数的理想真空常数的理想真空泵，答案也是否定的，答案也是否定的
18、u容器内容器内压强P随抽气降低，同一体随抽气降低，同一体积（V）对应的气体量（的气体量（PV）越来越小越来越小u就气体量而言，抽气就气体量而言，抽气实际上越来越慢上越来越慢时间常数越大，压强下降越慢，“惰性”反映系统和泵的综合性能时间常数就是压强值将为1/e所需时间压强降低1个数量级需要2.303个时间常数2021/9/2315Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science a
19、nd Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology机械泵机械泵2021/9/2316Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology V
20、acuum Science and Technology Vacuum Science and Technology早期机械泵早期机械泵l液体泵u利用液体压缩和排气l往复泵斯普伦杰尔泵水喷射泵2021/9/2317Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science
21、 and Technology Vacuum Science and Technology水环泵水环泵2021/9/2318Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology
22、旋转式真空泵旋转式真空泵l容积压缩泵u使用机械方法使一个工作室体积周期性的扩大和缩小达到抽气目的n旋片式n定片式n滑阀式2021/9/2319Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and T
23、echnology旋片泵旋片泵l最常用的粗真空最常用的粗真空泵u皮皮带泵和直和直联泵u单级泵和双和双级泵u实际上就是一个小型旋上就是一个小型旋转压缩机机2021/9/2320Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacu
24、um Science and Technology旋片泵工作图旋片泵工作图2021/9/2321Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology最大抽速最大抽速l几何抽速L
25、：泵腔深度（摩擦力）L=0.5-2.0D1 否则电动机功耗太高j：翼片伸缩频率 一般j=450转/分D2：不能太小，否则旋片泵的翼片容易断裂或密封不良旋片式旋片式:D2=0.75-0.85D1定片式定片式:D2=0.80-0.90D1滑阀式滑阀式:D2=0.65-0.70D12021/9/2322Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Va
26、cuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology有害空间有害空间l理想抽速l理论上的极限压强u压缩比（排气口压强与进气口压强比）l机械泵油封1.有害空间 2.定子 3.转子 4.旋片2021/9/2323Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science a
27、nd Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology机械泵油机械泵油l功能u润滑剂u密封剂u热传导/冷却u腐蚀防护l基本要求u化学稳定性u热稳定性u适当的润滑能力u适度的粘性u低饱和蒸汽压l矿物油u各种馏分混合u棕色-5/literu白色-20/literu氧化l合成泵油u炭氟化合物n惰性n500/liter2021/9/2324Vacuum Science and Technology Vacuum Science and Technolo
28、gy Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology典型的直联式旋片泵典型的直联式旋片泵l电机和机和泵直接相直接相连 j提高提高 1450转/分分钟 l7 cfm（cubic ft per minute）=鞋盒尺寸鞋盒尺寸l60 cfm=中等大小的狗尺寸中等大小的狗尺寸lEssential
29、ly all rotary vane pumps in research laboratories are now Direct Drive2021/9/2325Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Sci
30、ence and Technology双级旋片泵双级旋片泵l两个串两个串联压缩腔腔l更低的极限真空更低的极限真空 10-4Torrl低返油低返油2021/9/2326Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum S
31、cience and Technology抽速曲线抽速曲线l压强较高时，抽速稳定l压强较低时，抽速显著下降l极限压强时，抽速为0单级双级2021/9/2327Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Scien
32、ce and Technology气镇气镇l抽除冷凝蒸汽（如水蒸汽）u饱和蒸汽且温度较高-立刻凝结u蒸汽压缩-压强增大-凝结u凝结液体与泵油混合u低压侧蒸发，限制极限压强l气镇阀u定时将一定量空气放入压缩区u压缩气体-蒸汽混合物u提前喷射20C水蒸气 Pv=17.5Torr60C水蒸气 Pv=149Torr压缩比9:12021/9/2328Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Sci
33、ence and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology可抽除的蒸汽压可抽除的蒸汽压2021/9/2329Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science an
34、d Technology Vacuum Science and Technology Vacuum Science and Technology返油返油l油的返流u油蒸汽逆着气流的方向进入泵入口，并进入真空室u返油量随着真空度的降低而增加u最轻的馏分l防止返油u吸附阱u低返油的泵油（贵）u打开气镇2021/9/2330Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Te
35、chnology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology使用使用l启启动泵u一定的一定的转向和向和转速速u冷却冷却l关关泵u回油回油u放气放气u电磁磁阀lGreat for pumping on airu2X-2（2L/s）1500u维护费用低l防止水汽、杂物(尤其腐蚀性物质)进入泵油2021/9/2331Vacuum Science and Technology Vacuum Science and Technology Vacuum Science a
36、nd Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology旋片泵小结旋片泵小结l压强范围u大气压-10-3Torrl优点u可靠u价廉u抽大气l缺点u噪音u脏u油u大且重2021/9/2332Vacuum Science and Technology Vacuum Science and Technology Vacuum Scien
37、ce and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology分分 子子 泵泵2021/9/2333Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Techno
38、logyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology分子牵引分子牵引l基本原理：动量传输u分子流条件下，碰撞运动表面的分子，离开表面时具有和运动表面速率u相近的切向速率u气体分子从具有运动的表面得到定向动量2021/9/2334Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology
39、 Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology牵引分子泵牵引分子泵-Gaede泵泵l h l特点：u分子平均速度越大，S越大 10000转/分uUB UL和气导相关，反比M1/2，M越大，S越大l优点：u启动时间短u容易抽重气体分子l缺点：u密封间隙太小(hp2)UL:缝隙漏率UDC:逆时针返流2021/9/2335Vacuum Science
40、and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology涡轮分子泵涡轮分子泵轴向交错排列的转子和定子,转速16000-40000叶轮很薄（3mm)，单极压差很小，但数量很多（多级）转子直径越大，要求叶片数量越多
41、倾角越小，压缩比越大，但抽速小 一般20度 单极压缩5开缝（间隙1mm)具有实用价值2021/9/2336Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology抽速曲线抽速曲线1
42、0-2Torr 取决于前级泵取决于前级泵几乎与种类无关几乎与种类无关,M较小时较小时S略降低略降低但对氢抽速比空气抽速大但对氢抽速比空气抽速大20%逆扩散，极限压强逆扩散，极限压强10-10Torra:抽速45m3/h前级泵b:抽速10m3/h前级泵稳态(S=0)时M越大,压缩比越大H2 1000N2 108Ar 109重氢化合物 10102021/9/2337Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technolog
43、yVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology涡轮分子泵基本结构涡轮分子泵基本结构2021/9/2338Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Va
44、cuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology以中型涡轮分子泵为例以中型涡轮分子泵为例横式:中部为高真空端,两端为前级高真空端定子和转子各12片,每片开槽48条,=30o前级端定子8片,转子7片,每片开槽20条,=15o转速16000转/分(外沿线速度150m/s)最大抽速 140L/s压缩比 k=5x10-7经过300度烘烤后,极限压强pu10-10Torr2021/9/2339Vacuum Science and Technology Vacuum Science
45、 and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology横式和立式分子泵比较横式和立式分子泵比较横式横式立式立式泵体T型双端，造价贵异物落入时不损伤叶片寿命长噪声大泵体直圆筒型，造价低异物落入引起损伤平衡轻微变化会造成不稳定轴承损伤后不易更换2021/9/2340Va
46、cuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology涡轮分子泵系统涡轮分子泵系统2021/9/2341Vacuum Science and Technology Vacuum Sc
47、ience and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology应用应用l最高工作压强u10-2-10-1Torr之间u需要前级泵l电源u专用中频电源u启动电机，5min后转速稳定，泵正常工作u强迫冷却l极限压强u取决于最轻气体成分nHe2021/9/2342Vac
48、uum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology涡轮分子泵小结涡轮分子泵小结l启动压强 10-2Torrl极限压强 10-10Torrl优点u无油泵，干净u排出气体l缺点u振动u
49、价格昂贵u相相对效率低效率低u对He 抽速较低u机械损坏灾难性损坏2021/9/2343Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology罗茨泵罗茨泵l原理u容积压缩分子牵引
50、l结构u两个双叶型转子u相反方向运转u运转过程中紧密配合，不互相触及，也不触及泵体u压缩比低,返流大（前级真空）u无摩擦,转速高,相对抽速大2021/9/2344Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Science and TechnologyVacuum Science and Technology Vacuum Science and Technology Vacuum Science and Technology Vacuum Sci