《1微机电基础技术简介2000国科会北区微机电系统研究中心.pdf》由会员分享，可在线阅读，更多相关《1微机电基础技术简介2000国科会北区微机电系统研究中心.pdf（63页珍藏版）》请在taowenge.com淘文阁网|工程机械CAD图纸|机械工程制图|CAD装配图下载|SolidWorks_CaTia_CAD_UG_PROE_设计图分享下载上搜索。
1、1微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬電化學分析方法與感測器El e c t r o c h e m i c a l Se n s o r林啟萬臺灣大學醫工所2微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬電化學分析方法與感測器I.IntroductionII.Basics of Electrochemical measurementIII.Types of Electrochemical SensorsIV.Applications of Electrochemical SensorsV.Future developments3微機電基礎技術簡介2000
2、國科會北區微機電系統研究中心林啟萬I.化學感測器之應用臨床及生醫研究藥物測試，醫療儀器之診斷與治療用工業藥廠品管，發酵製程，廢水廢棄物監測農業成熟度、儲藏、農藥與運輸過程之檢測安全防衛毒性物質檢測環保空氣、水質污染機器人自動化檢測應用4微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬I.化學感測器之種類 Electrochemicala.ConductimetricConductanceEnzyme-catalysed reactionsb.Enzyme electrodeAmperometric Enzyme and Ab-Agc.Field effect transistors
3、PotentiometricIons,gases,enzymes,Ab-Ag(FET)d.Ion-selective electrodesPotentiometricIons,enzyme,Ab-Ag(ISE)e.Gas-sensing electrodesPotentiometricGases,enzymes,organelle,cell,tissue,enzyme,Ab-Ag Piezo-electric crystalsMass changeVolatile gases,vapours,and Ab-Ag OptoelectricOpticalpH,enzyme,Ab-Ag Thermi
4、storsHeatEnzyme,organele,cell or tissuegases,pollutants,antibiotic,vitamins5微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬I.臨床非破壞性診斷之現況方法空間解析度時間解析度監測能力新陳代謝參數X 光0.1 m m0.1 s e c有限無斷層掃瞄 0.1 m m即時有無磁核共振影像 10-6 10-9 mol/l?Easy manufacture with high yield ratesBulk process in mind?Nondestructive,reliable,inexpensive qua
5、lity control procedure for each piece producedTotal quality control9微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬II.Basics of Electrochemical measurementII.1.EC as an energy source for perturbation:Electrochemical measurement on chemical systems can provide thermodynamic data about a reaction,generate an unstable
6、intermediate ion and study its rate of decay or its spectroscopic properties.These applications require an understanding of the fundamental principles of electrode reactions and the electrical properties of electrode-solution interfaces.Ref:A.J.Bard,L.R.Faulkner,“Electrochemical Methods Fundamentals
7、 and Applications”,John Wiely&Sons,Inc.198010微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬II.2.Electrochemical cells and reactionsWe primarily are concerned the processes and factors that affects the charge across interfaces between chemical phases in electrochemical reactions.There are two phases in an interface,
8、electrolyte and electrode.Electrolyte is a phase that charge iscarried by the movement of ions.It can be liquid solutions,fused saltsorionicallyconducting solids.Electrode is a phase through which charge is carried by electronic movement.Electrodes can be metals,semiconductors,in either solid or liq
9、uid phase.An electrochemical system is defined most generally as two electrode separated by at least one electrolyte phase.There is a measurable potential difference between the two electrodes whether the cell is passing current or not.11微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬This potential is the collected
10、differences in electricalpotetnial between all of the various phases in the current path,especially at the interface.The sharpness of the transition implies that a very high electric field exists at the interface,and thus exert great effects on the kinetic behavior of charge carriers(electrons or io
11、ns)in the interfacial region.The magnitude of the potential difference at an interface affects the direction of charge transfer.Thus the measurement and control of cell potentials is one of the most important aspects of experimental electrochemistry.Notation:/:a phase boundary,:separation between tw
12、o components in the same phaseFor example:Pt/H2/H+,Cl-/AgCl/Ag12微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬The overall chemical reactions taking place in a cell is made up of two independent half-reactions,which describe the real chemical changes at the two electrodes.Each half-reaction responds to the interfaci
13、al potential difference at the corresponding electrode.Most of the time one is interested in only one of these reactions,and the electrode at which it occurs is called the working(or indicator)electrode.To standardize the other half of the cell,one uses an electrode made up of phases having constant
14、 composition as a reference electrode.The internationally accepted primary reference is the standardhydrogen electrode(SHE,NHE),which has all components at unit activity.To simplify experiment setup,one often use the saturated calomel electrode(SCE,Hg/Hg2Cl2/KCl),which has 0.242 V vs.NHE.(Ag/AgCl fo
15、r in vivo experiments)13微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬Therefore,we observe or control the potential of the working electrode with respect to the reference one.It is equivalent to observing or controlling the energy of the electrons within the working electrode.By driving the electrode to more negati
16、ve potentials the energy of the electrons is raised,and they will eventually reach a level high enough to occupy vacant states on species in the electrolyte(electrons flow from electrode to solution,a reduction current).Similarly,the energy of the electrons can be lowered by imposing a more positive
17、 potential,and at some point electrons on solutes in the electrolyte will find a more favorable energy on the electrode and will transfer there(electrons flow from solution to electrode,a oxidation current).The critical potentials at which these processes occur are related to the standard potentials
18、,E0,for the specific chemical substances in the system.*So,we need to know the relative potential level of species in the reaction to verify the relative order of oxidation/reduction during the potential manipulation.14微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬The above mentioned electron transfer processes at
19、the metal-solution interface of electrode is termed Faradaic processes(Faradays law:the amount of chemical reaction caused by the flow of current is proportional to the amount of electricity passed).There are times that a given electrode-solution interface will show a range of potentials where no ch
20、arge transfer reactions occur because such a reaction is thermodynamically or kinetically unfavorable.However,adsorption anddesorption can still occur,and the structure of the electrode-solution interface can change with changing potential or solution composition.These processes are termed nonfarada
21、ic processes(capacitance).Although charge does not cross the interface under these conditions,external currents can still flow(transiently)when the potential,electrode area,or solution composition changes.15微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬II.3.The Nature of Electrode-Solution Interface(One electrode)I
22、I.3.1 The Ideal Polarized Electrode and NonfaradaicprocessesAn ideal polarized electrode(IPE)is an electrode,which has no charge transfer across the metal-solution interface regardless the potential imposed by an outside source of voltage(good for reference).There is no such electrode that can ideal
23、ly function as an IPE in the whole potential ranges.The SCE can function as an IPE in the range of 1.5 V.Outside this range,Hg will oxidize(Hg+Cl-1/2Hg2Cl2+e-,0.25 V vsNHE)or K+will be reduced(K+Hg+e-K(Hg),2.1V vs NHE).Small currents can still occur on this electrode due to reduction of water or tra
24、ce of impurities.An IPE behaves like a capacitor,which accumulates charge at the interface.At a given potential,there will exist equal amount of charges on the metal electrode and in the solution.The polarity of the charge on the metal with respect to the solution depends on the potential across the
25、 interface and the composition of the solution.The charges in the vicinity of the electrode(0.1um),expressed in charge density(=q/A,A:electrode area),forms the electrical double layer.At a given potential,this double layer can be characterized by a double-layer capacitance,Cd,in the range of 10 to 4
26、0 uF/cm2.Unlike the real capacitor,Cdis a function of potential.16微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬II.3.2 Electrical Double Layer:There are several layers in the solution side of double layer.An inner Helmholtz plane(IHP)is formed by specifically adsorbed solvent molecules and other species(ions or mol
27、ecules)with the thickness of x1,which is the locus of the electrical centers of the adsorbed ions.An outer Helmholtz plane(OHP)is formed by the solvated ions with the distance of x2,which is the locus of centers of these nearest solvated ions.The interaction of this OHP with metal electrode is due t
28、o long-range electrostatic forces,which is independent of the chemical properties of the ions,andforms a diffusion layer extended in to the solution.The total charges density in the double layer of solution is equal to the sum of the accumulated charges in these two layers,S=i+d=-M.The thickness of
29、the diffuse layer depends on the total ionic concentration in the solution,which is around few hundreds.The structure of the double layer can affect the rates of electrode processes due to the potential drop in this diffuse layer and thus reduced the effective applied potential on the electroactive
30、species.This layer also contributes to the nonfadaradic current during the measurement of EC.17微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬II.3.3 Equivalent circuit model of double layer:An EC cell consisting of an IPE(mercury drop electrode)and an ideal reversible electrode(SCE)can be approximated by an electric
31、al circuit of a resistor,Rs(solution resistance),a capacitor,Cd(double layer capacitance),and capacitor,CSCE(capacitance at SCE).With CSCECd,CT=Cdfor a series connection.It is instructive to consider the behavior of working electrode as a RC circuit to several types of electrical perturbation,voltag
32、e step,current step,and voltage ramp.II.3.3.1 Voltage step:RC circuit after applying a constant voltage step.Remembering,and by KVL,With initial condition q=0,the behavior of the current,I,with time,t,after applying a potential step of magnitude E,is.The current response is an exponentially decaying
33、 curve with a time constant,=RSCd.(For a RS=1,Cd=20 uF,=20 usec,the charging of double layer through solution will reach 95%complete in 60 usec)CdECq=dSCRCqiREEE/+=+=SdSRECRqdtdqi/+=dSCRtSeREi/=18微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬II.3.3.2 Current step:RC circuit after applying a constant current stepSin
34、ce,Again by KVL,Or II.3.3.3 Voltage ramp:Potential sweep in volts per secondThe superposition rule holds for such a system with the analysis given above.E=Ei+vt=Rsdq/dt+q/Cd.Results in current,.The current now contains a transient part,which dies away with a time constant,RsCd,and a steady state cur
35、rent,vCd(a way to measure Cd).If we apply a triangular wave,+v to v at some potential to the RC circuit,then the steady-state current changes from vCdto v Cdduring the forward and reverse scan(Cycle Voltametry).+=tdSdtCiiRE0=idtq)/(dSCtRiE+=)/exp()(dsdsidCRtvCREcCi+=19微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬I
36、I.4.Types and definitions of EC cells:Two electrodesEC cells can be classified as either galvanic or electrolytic cells.A galvanic cell is one in which reactions occur spontaneously at the electrodes when they are connected externally by a conductor.These cells are often used in converting chemical
37、energy into electrical energy.An electrolytic cell is one in which reactions are effected by the imposition of an external voltage.These cells are often used to carry out desired chemical reactions by expending electrical energy.However,for a single electrode,its reactions and behavior is independen
38、t of whether this electrode is part of a galvanic or electrolytic cell.We thus will define the electrode at which reductions occur the cathode and the electrode at which oxidations occur the anode.A current in which electron cross the interface from metal to a species in solution is termed a cathodi
39、c current while electron flow from a solution species into the metal is called an anodic current.20微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬II.4.1 Variables and Factors in EC CellsEC cells can be considered as a perturbed system by electrical energy,just as the photons in a spectrophotometric system.In order t
40、o study the system transfer function(thermodynamic,kinetic,analytical,etc),one can perturb the system with certain excitation function(e.g.,pulse,step,sweep.)and measure the system response function(e.g.,the resulting current with time).In such a system,one needs to control certain variables of the
41、EC cell and observe how the others vary with changed ones.These include(1)external variables(temperature,pressure,time),(2)electrode variables(material,surface area,geometry,surface condition),(3)electrical variables(potential,current,charge),(4)mass transfer variables(diffusion,convection,surface c
42、oncentration,adsorption),(5)solution variables(bulk concentration of electroactive species,concentration of other possible interference species,solvent).For a homogeneous reaction,the electrolysis rate and faradaiccurrent is proportional to a constant,N.,.However,for a heterogeneous reaction with a
43、rate that depends on mass transfer and various surface effects,the reaction rates are usually described in units of mol/sec per unit area,i.e.,nFjnFAiv=)()/()(rolyzedmoleselectNmolecoulombsCoulombsnFQ=21微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬22微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬Information regarding the electrode
44、 reaction can be determined from the I-V curve.The departure of the electrode potential from the reversible(nerstian)value upon passage of faradiac current is termed polarization.So,for an ideal polarized electrode,it shows a very large change in potential upon the passage of current.While for an id
45、eal nonpolarizable electrode,its potential does not change upon passage of current.The deviation from the equilibrium potential is measured by theoverpotential,which is equal to E Eeq.II.4.1.1 Factors affecting the rate of an electrode reactionAs mentioned above,the electrode reaction rate on the su
46、rface of an electrode with the conversion of dissolved oxidized species,O,and reduced species,R,in solution,O+ne R,is governed by:(1)Mass transfer,(2)Electron transfer at the surface,(3)Chemical reactions preceedingor following the electron transfer(protonation,dimerization,catalytic decomposition),
47、(4)Other surface reactions(adsorption,crystallization).It depends on the chemical system that we are investigated.The reactions can range from simple to very complex for multiple parallel pathways.23微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬24微機電基礎技術簡介2000國科會北區微機電系統研究中心林啟萬One of these reaction steps will be the
48、 rate-limiting step,which puts a upper limit on the steady state current.Even with this rate-limiting current that flows in the complete circuit of EC cell,there will be a certain overpotential,.One can characterize the reaction step with series of resistance components.The effective potential on th
49、e electrode can be presented as Eappl=Eeq+iRs,where Rs is theohmic potential drop along the solution path.It can be minimized by proper cell and instrumentation design.If the passage of current does not affect the potential of the reference electrode(ideal nonpolarized electrode),the potential of wo
50、rking electrode can be given by above equation.With small iRs(2 mV,say for I 10 uA,Rs H+K+NH4+Na+Li+Solid-state:The sensor is a thin layer of a single or mixed crystal or precipitate which is an ion conductor.(Silicone rubber,PVC)Liquid ion-exchange:Dissolving an organic ion exchanger in an appropri