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1、Page 1CONFIDENTIAL晶体生长模拟FEMAG蓝宝石生长模拟方法FEMAGSoft S.A.,BelgiumA SPIN-OFF company fromUniversite catholique de LouvainBelgiumProfessor F.DupretPage 2CONFIDENTIAL General introduction Sapphire GrowthContentPage 3CONFIDENTIALIntroductionFor more than 25 years,FEMAGSoft develops simulation software dedica
2、ted to the research and development of optimal crystal growth processes.1984 First research on Germanium growth in University of Louvain.Prof.Franois Dupret1989 First research on Silicon growth in University of Louvain.1992 First collaborations with major IC companies.Development of defect-free sili
3、con wafer production.Today,more than 35 patents are referencing FEMAG Software2003 FEMAGSoft S.A.,spin-off from University of Louvain.2006 Collaboratrion with major Solar companies.Development of low-cost and low-oxygen content processes.2009Large investment for a new software framework2010 Release
4、of Software application for Sapphire ingot production.Page 4CONFIDENTIALCzochralski processPage 5CONFIDENTIALDirectional Solidification SystemPage 6CONFIDENTIALFloating Zone ProcessPage 7CONFIDENTIALSapphire Growth by CZ and kyropoulosPage 8CONFIDENTIALSapphire growth by HEMPage 9CONFIDENTIALWhat ar
5、e FEMAG software?Process-dedicated simulation tools,adapted to your own processes and able to solve your problems.Global All the furnace components are considered.All the heat transfer mode are considered(radiation transfer,heat conduction,melt and gas convection)Induction and ohmic heatingTime Depe
6、ndentPage 10CONFIDENTIALProcess-dedicated tools FEMAG-CZ:CzochralskiFEMAG-FZ:Floating Zone FEMAG-VB:Vertical BridgmanFEMAG-CZ/OX:Czochralski for SapphireFEMAG-KY:KyropoulosFEMAG-DS:Directional SolidificationFEMAG-HEM:Heat Exchange MethodGain of time.Process mastering Accurate and right to the point
7、Page 11CONFIDENTIALPlatform orientedFRAMEWORK:FEMAG3RADIATIONCONVECTIONMESHGEOMETRYCONDUCTIONFEMAG-CZFEMAG-HEMFEMAG-DSFEMAG-KYROPOULOSFEMAG3 NEW 2011Very accurate:Finite Element and Spectral methodsVery efficient:3D simulations in less 1 dayVery flexible:Very fast development of new demand Page 12CO
8、NFIDENTIALGlobal simulations Czochralski Furnace for SiliconHEM Furnace for SapphireNo simplification of the process conditions Page 13CONFIDENTIALDynamic simulationsA dynamic simulation toolComplete process simulationDynamic effect of interface deformation Varying processing conditions Page 14CONFI
9、DENTIALSapphire Crystal Growth SimulationPage 15CONFIDENTIALSapphire Simulation Objective The market of Sapphire is experiencing a very fast growth rate and become very competitiveMany companies invest in simulation software in order to reinforce their positions HEM,Czochralski and Kyropoulos proces
10、s require optimization and a good understanding Strong need for efficient numerical tools.Radiation effects in the participating crystal and melt is a complex problem.Page 16CONFIDENTIALSapphire Simulation ObjectiveOur goal is to provide accurate simulation tool,able to take all the process features
11、 into account and to optimize the growth process in terms of the resulting crystal quality.Page 17CONFIDENTIALSapphire Simulation ObjectiveKYROPULOSCZOCHRALSKIHEMPage 18CONFIDENTIALFEMAG-CZ/OXFEMAG-CZ/OX Software to simulate Sapphire Growth by CZ and KyropoulosSpecifications:-Temperature in the sapp
12、hire and in all furnace components by solving the global heat transfer in the furnace(radiation,conduction,convection).-Flow velocity in the sapphire liquid phase.-Crystallization front shape-Ohmic and Induction Heating-Advanced radiation heat transfer in the sapphire-Gas convection-Anisotropic ther
13、mal stresses in the crystalPage 19CONFIDENTIALTemperature in the Hot ZoneFEMAG-CZ/OXCZ processwith Induction Heating systemInduction Heating systemPage 20CONFIDENTIALTemperature in the crystal and in the melt FEMAG-CZ/OXCZ processwith Induction Heating systemPage 21CONFIDENTIALMelt velocity amplitud
14、e FEMAG-CZ/OXCZ processwith Induction Heating systemThe interface shape and position is a result of the simulation Page 22FEMAGSoft 2012Temperaturefield in the meltStreamfunctionFEMAG-CZ/OX/CZ and KYROPOULOS processPage 23FEMAGSoft 2012Melt meshes BLM(boundary layer mesh)Coarse meshBLM mesh is very
15、important to simulate the interface Page 24FEMAGSoft 2012Local temperature fieldResult using coarse meshResult using BLM meshBLM mesh enables a better prediction of the crystalisation interface Page 25FEMAGSoft 2012Velocity fieldResult using coarse meshResult using BLM meshPage 26CONFIDENTIALFEMAG-H
16、EMFEMAG-HEM Software to simulate Sapphire Growth by Heat Exchange MethodSpecifications:-Temperature in the sapphire and in all furnace components by solving the global heat transfer in the furnace(radiation,conduction,convection).-Flow velocity in the sapphire liquid phase.-Crystallization front sha
17、pe-Advanced radiation heat transfer in the sapphire-Gas convection-Anisotropic thermal stresses in the crystalPage 27CONFIDENTIALFEMAG-HEMFEMAGSoft CAD tool to introduce the geometryPage 28CONFIDENTIALFEMAG-HEMGlobal Temperature in the furnacePage 29CONFIDENTIALFEMAG-HEMMelt convection Detail of mel
18、t convection Page 30CONFIDENTIALFEMAG-HEMTemperature distribution in the crystal and melt for different times Velocity amplitude distribution in the melt for different times Page 31CONFIDENTIALAnisotropic Thermal Stress(HEM Sapphire A-axis)FEMAG-HEM quasi-steady simulation of the growth of a Sapphir
19、e crystal:3D von Mises invariant isovalues(Pa)FEMAG-HEM ExamplePage 32CONFIDENTIALAnisotropic Thermal Stress(HEM Sapphire C-axis)FEMAG-HEM quasi-steady simulation of the growth of a Sapphire crystal:3D von Mises invariant isovalues(Pa)FEMAG-HEM ExamplePage 33CONFIDENTIAL FEMAG-OX to simulate CZ and
20、Kyropoulos is available FEMAG-HEM to simulate HEM process is availableAdvanced radiation modelVery efficient(Parallel Software)Efficient melt flow calculation(laminar simulation)Thermal Stresses(A-axis,C-axis)Sapphire Growth Simulation-ConclusionPage 34CONFIDENTIAL Very fast solver less than one day
21、 to simulate a case Very accurate models Boundary Layer Mesh is unique and mandatory to capture the interface position Support service is very high standards,reactive and always ready to help 25 years of experience with international recognition Sapphire Growth Simulation/Unique features of FEMAGSoft